JPH0345125Y2 - - Google Patents

Info

Publication number
JPH0345125Y2
JPH0345125Y2 JP14022484U JP14022484U JPH0345125Y2 JP H0345125 Y2 JPH0345125 Y2 JP H0345125Y2 JP 14022484 U JP14022484 U JP 14022484U JP 14022484 U JP14022484 U JP 14022484U JP H0345125 Y2 JPH0345125 Y2 JP H0345125Y2
Authority
JP
Japan
Prior art keywords
probe
stage
board
fixed
probe board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14022484U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6154210U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14022484U priority Critical patent/JPH0345125Y2/ja
Publication of JPS6154210U publication Critical patent/JPS6154210U/ja
Application granted granted Critical
Publication of JPH0345125Y2 publication Critical patent/JPH0345125Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14022484U 1984-09-14 1984-09-14 Expired JPH0345125Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14022484U JPH0345125Y2 (en]) 1984-09-14 1984-09-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14022484U JPH0345125Y2 (en]) 1984-09-14 1984-09-14

Publications (2)

Publication Number Publication Date
JPS6154210U JPS6154210U (en]) 1986-04-11
JPH0345125Y2 true JPH0345125Y2 (en]) 1991-09-24

Family

ID=30698580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14022484U Expired JPH0345125Y2 (en]) 1984-09-14 1984-09-14

Country Status (1)

Country Link
JP (1) JPH0345125Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016082138A (ja) * 2014-10-20 2016-05-16 中央精機株式会社 ステージ装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4533271B2 (ja) * 2005-08-01 2010-09-01 株式会社日本マイクロニクス 表示パネルの電気検査装置
JP5631114B2 (ja) * 2010-08-24 2014-11-26 株式会社日本マイクロニクス 平板状被検査体の検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016082138A (ja) * 2014-10-20 2016-05-16 中央精機株式会社 ステージ装置

Also Published As

Publication number Publication date
JPS6154210U (en]) 1986-04-11

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